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    • 专利摘要:
    The present invention relates to a system for generating ultrashort light pulses wavelength-tunable in the spectral range of the visible or the infrared. According to the invention, said system comprises an injection module (10) comprising a light source (9, 99) and a spectral filter (8) tunable in wavelength, the light source (9, 99) being adapted to generating short light pulses (100) of nanosecond duration, in an emission spectral band having a spectral width of several tens of nanometers to several hundred nanometers, the spectral filter (8) having a spectral width between 250 pm and 3 nm and being adapted to spectrally filter and temporally filter said short light pulses (100), so that the injection module (10) generates ultrashort light pulses (110), spectrally filtered and tunable in wavelength; and at least one optical amplifier (20, 30) adapted to generate wavelength-tunable ultrashort amplified pulses (120, 130) as a function of the wavelength of the spectral filter (8).
    公开号:FR3031246A1
    申请号:FR1463399
    申请日:2014-12-29
    公开日:2016-07-01
    发明作者:Eric Cormier；Jerome Lhermite；Romain Royon；Laurent Sarger
    申请人:Centre National de la Recherche Scientifique CNRS；Universite de Bordeaux；
    IPC主号:
    专利说明:

    [0001] TECHNICAL FIELD The present invention relates generally to lasers. More specifically, the invention relates to a system and a method for generating light pulses of picosecond duration (ps) or sub-picosecond (sub-ps) tunable wavelength.
    [0002] In particular, the invention relates to a system and method for generating ps pulses or sub-ps continuously tunable in the wavelength range of visible, near infrared and / or the average infrared. In the present document, ultra-short pulse is understood to mean a pulse of duration of the order of one picosecond, between 0.1 ps and about 200 ps. Brief pulse means a pulse duration of the order of one nanosecond or sub-nanosecond, between about 200 ps and 100 ns. In this paper, the spectral range of electromagnetic radiation is considered to extend in the visible range from 400 to 800 nm, the ultraviolet range from 300 to 400 nm, the near infrared from 800 nm to 1.5 micron, medium infrared of 1.5 to 10 microns and the far infrared of 10 to 20 microns. STATE OF THE ART Lasers today find extremely varied applications. More particularly, in bio-imaging and in medicine, one chooses among the laser sources available, the source best adapted according to the particular needs of a precise application. The field of operation of a laser source is defined by a set of specific parameters including in particular the range of accessible wavelength, the time regime and the level of energy and / or power delivered. Depending on the type of laser used, the wavelength range of a laser can be located in the ultraviolet, the visible or the infrared. The time regime of a laser can be continuous or pulse, the pulses can be of nanosecond duration, picosecond or femtosecond. The energy and power delivered by a laser can also vary by several orders of magnitude depending on the type of laser. In an imaging platform or a medical office, to achieve different applications, it is currently necessary to have several laser sources each having a specific operating domain, each laser source being dedicated to a specific application. For example, a dye laser emitting at a red wavelength (about 800 nm) in a continuous mode is used. A neodymium-YAG (Nd-YAG) laser operates in pulsed or continuous near infrared (-1 μm) mode. A frequency doubled Nd-YAG laser in a KTP crystal operates in pulsed or continuous mode for green wavelength emission (0.5 μm) and an erbium-YAG laser (Er-YAG) for a infrared emission at 3 pm. However, the increase in the number of laser sources results in an increase in the investment and operating cost, as well as in the complexity of the implementation and maintenance. The multiplicity and diversity of specific laser sources constitutes a major obstacle to their wider diffusion. In addition, even in a well-equipped medical or imaging center, the range of treatments is generally limited, in particular by the reduced choice of accessible wavelengths. Thus, in dermatology, following the patient's complexion, it must be possible to use a well-defined wavelength. It is therefore particularly desirable to develop a single laser source capable of generating laser radiation having a field of operation, and in particular an adjustable wavelength to be most effective with respect to a particular pathology.
    [0003] On the other hand, in order to increase the power of the pulses without increasing the heat deposition, it is desirable to use pulses of shorter and shorter duration. More precisely, it is desirable to switch from the nanosecond or subnanosecond pulse regime, that is to say at least several hundred picoseconds, to a picosecond pulse regime.
    [0004] There are wavelength-tunable dye lasers which can generate a laser beam of power from 1 mW to 10W. However, the wavelength tunability of a dye laser is based on the use of different dyes in the liquid phase. A disadvantage is that each dye has a limited life. In addition, dye lasers impose severe maintenance constraints. This path has been abandoned for a long time and the only dye lasers still on the market have a very small wavelength range, mostly single-color. Laser systems based on the combination of a near infrared laser source and a nonlinear optical crystal are also known to produce, by second harmonic generation, visible radiation tunable over a range of 40 nm in the blue (between 450 and 490 nm) and over a range of 60 nm in the green (between 500 and 560 nm), with pulse durations of 0.1 ps to 100 ns. Other light sources, such as optical parametric oscillator or OPO, are based on a solid non-linear optical component placed in an optical cavity. Under particular phase matching conditions, from a pump wave, an OPO generates a signal wave and a complementary wave (idler), the sum of the optical frequencies of the signal wave and the wave. complementary being equal to the optical frequency of the pump wave. The wavelength tunability of an OPO is obtained by modifying the orientation and / or the temperature of the non-linear optical component. Nevertheless, OPO sources have not given rise to any industrial development.
    [0005] TECHNICAL PROBLEM There is therefore a need for a system and a method for producing a system for generating high power and / or high energy light pulses, tunable in wavelength over a wide spectral range in the field of visible at the middle infrared.
    [0006] Preferably, it is desirable for the light pulse generating system to be fiber-bundled at the output. One of the aims of the invention is to propose a system for generating ultrashort light pulses that are continuously tunable in wavelength over a wide spectral range. The present invention aims to overcome the disadvantages of prior systems and more particularly relates to a system for generating ultrashort light pulses tunable wavelength in a spectral range between the ultraviolet and infrared.
    [0007] According to the invention, the system comprises an injection module comprising a light source and a spectral filter tunable in wavelength, the light source being adapted to generate short light pulses, of duration between several hundred picoseconds and a hundred nanoseconds, said short light pulses extending over an emission spectral band in the near infrared domain, the emission spectral band having a spectral width of several tens of nanometers to several hundred nanometers, the filter spectral signal having at least one spectral bandwidth defined by a spectral width of between 10 pm and 10 nm, preferably from 250 pm to 1 nm, and a central wavelength, said spectral bandwidth being tunable in a spectral range [Lambdal ; Lambda2] included within the emission spectral band of the source, the spectral filter being adapted to spectrally filter and to temporally shape said short light pulses, so that the injection module generates ultrashort light pulses, of nanosecond duration, femtosecond or picosecond, and preferably of the order of one picosecond, spectrally filtered and wavelength-tunable according to the central wavelength said spectral bandwidth; and at least one optical amplifier disposed at the output of the injection module, said at least one optical amplifier being adapted to receive said spectrally filtered and wavelength-tunable ultrashort light pulses and to generate by spectral amplification spectrally filtered ultra-light amplified pulses. and wavelength-tunable according to the center wavelength of said spectral bandwidth of the spectral filter. The invention makes it possible to generate pulses that are both ultrashort (from 1ps to about 20 μsec), spectrally filtered with a spectral width of between a few hundreds of μm and a few nm, and wavelength-tunable over a wide spectral range, for example over a spectral range of at least 50 nm to 300 nm wide, for example in the near infrared range, the central wavelength being about 1 micron. Thus, the injection module is wavelength-tunable over the spectral range [Lambdal; Lambda2] of the filter while generating ultrashort pulses and low spectral width. This injection module makes it possible to inject pulses into different optical amplifiers, and thus to obtain ultra-long and tunable amplified pulses in wave length over a wide spectral range, each pulse having a small spectral width. order of the nanometer). These amplified pulses thus have a high power spectral density. The power spectral density is defined here as the ratio between the power of a pulse and the spectral width of this pulse. The pulse generation system does not use a pulse compressor, but simply a broadband spectral source combined with a filter having a wavelength tunable bandwidth and an optical amplifier. The wavelength tuning of the amplified pulses is very easy to control by the wavelength tuning of the filter. In a first embodiment the light source comprises a supercontinuum source and the spectral filter is disposed on an optical path downstream of the supercontinuum source. In a second embodiment, the light source comprises an amplifying nonlinear loop mirror, the nonlinear amplifying loop mirror comprising another optical amplifier disposed on the optical path of the nonlinear loop mirror and the spectral filter being disposed on the optical path of the nonlinear loop mirror. In a variant of this second example, the nonlinear amplifying loop mirror is in the form of 8 and comprises a first bidirectional amplifying non-linear loop 20 and a second unidirectional nonlinear loop, the spectral filter being arranged in the first non-linear loop. linear. Advantageously, the spectral filter comprises a prism-based filter, a diffraction grating-based filter, an interference filter, a birefringent filter, a Bragg mirror diffractive filter, a resonant mirror diffractive filter, an acousto-filter. optic or an acousto-optic filter in thin layers. According to a particular aspect, the spectral filter is an interference filter or an acoustooptic filter configured to simultaneously filter a plurality of spectrally spaced spectral bandwidths from each other, each spectral bandwidth being defined by a central wavelength and a spectral width. between 10 pm and 10 nm, and each central wavelength of the spectral filter being tunable in a spectral range within the emission spectral band of the light source. Preferably, the spectral filter has a spectral width of less than 1 nm. According to a particular and advantageous aspect of the invention, said at least one optical amplifier comprises a plurality of optical amplifiers arranged in a star around the injection module. According to another particular and advantageous aspect of the invention, said at least one optical amplifier comprises a fiber optic preamplifier and a power fiber optic amplifier arranged in series.
    [0008] According to a particular and advantageous embodiment, the light source, the spectral filter and / or the at least one optical amplifier comprise optical fiber components. According to another particular and advantageous aspect of the invention, said at least one optical amplifier comprises a rare-earth doped optical fiber. In one embodiment of the invention, the ultrashort light pulse generation system further comprises a negative dispersion dispersive optical component disposed at the output of the at least one optical amplifier, the dispersive optical component being adapted to simultaneously receive a pulse. pump and an ultra-short amplified pulse and for generating, by nonlinear optical effect of four-wave mixing, a first optical signal and a second optical signal, the first or the second optical signal comprising a light output pulse of duration of l of the picosecond to one hundred picoseconds at a predetermined wavelength in the ultraviolet, visible or infrared range and having a spectral width of less than 10 nm, the predetermined wavelength of the output light pulse being tunable according to the central wavelength of the spectral filter. According to a particular and advantageous aspect of this embodiment, the dispersive optical component comprises a photonic optical fiber section. The invention also relates to a method for generating ultrashort light pulses tunable in wavelength, comprising the following steps: generating short light pulses of low power, with a duration of between several hundreds of picoseconds and a hundred or so nanoseconds, said short light pulses extending over an emission spectral band having a spectral width of several tens of nanometers to several hundreds of 25 nanometers, preferably said short light pulses being chirped linearly; spectral filtering of said short pulses at a wavelength comprised in a spectral bandwidth defined by a central wavelength Lambda3 and a spectral width 3.1ambda3 of between 10 μm and 10 nm, the central wavelength (Lambda3) said spectral filtering bandwidth being tunable within a spectral range ([Lambdal; Lambda2]) within said emission spectral band, the spectral filter being adapted to spectrally filter and to temporally shaping said short light pulses, preferably linearly chirped, so as to generate ultrashort light pulses of duration of the order of one picosecond, spectrally filtered and wavelength-tunable as a function of the wavelength of said spectral bandwidth, and optical amplification of said spectrally filtered ultrahigh pulses to generate spectrally filtered and wavelength-tunable ultrashort amplified pulses as a function of the central wavelength of the spectral bandwidth of the spectral filtering.
    [0009] According to a particular and advantageous aspect, the method of generating ultrashort light pulses tunable in wavelength further comprises the following step: generating, from a pump pulse and an ultrashort amplified pulse, by a nonlinear optical effect of four-wave mixing in a negative-dispersion dispersive optical component, a first optical signal and a second optical signal, the first or the second optical signal comprising an ultrashort light output pulse, of duration of the order of one picosecond to one hundred picoseconds and to a predetermined wavelength in the ultraviolet, visible or infrared range with a spectral width of less than 10 nm, the predetermined wavelength of the pulse ultra-fast output light being tunable according to the central wavelength (Lambda3) of said spectral bandwidth of the spectral filtering. The invention will find a particularly advantageous application in light pulse generation systems for application to imaging in bio-imaging and / or medicine.
    [0010] The invention advantageously makes it possible to provide a system for generating ultrashort light pulses that can be tuned in wavelength over a wide spectral range. In a particular embodiment, the laser system makes it possible to generate continually tunable wavelength pulses in the visible range of 550 nm to 750 nm or 850 nm and / or in the infrared range of 1.3 to 3 microns. .
    [0011] The present invention also relates to the features which will become apparent in the course of the following description and which should be considered in isolation or in all their technically possible combinations. This description given by way of nonlimiting example will better understand how the invention can be made with reference to the accompanying drawings in which: - Figure 1 schematically shows the general architecture of a system of ultrashort light pulse generation wavelength tunable according to the invention; FIG. 2 diagrammatically represents an injection module according to a first embodiment based on a supercontinuum source; FIG. 3 diagrammatically represents an injection module according to another embodiment based on a non-linear loop mirror (NOLM) or an amplifier non-linear loop mirror (NALM); FIG. 4 schematically represents a pre-amplification module; - Figure 5 schematically shows a power amplifier module; FIG. 6 schematically shows a system of generation of wavelength tunable ultrashort light pulses combined with a four-wave mixing frequency converter module; FIG. 7 illustrates an exemplary embodiment of a system for generating tunable ultrashort light pulses based on a supercontinuum source injection module 3031246 7 coupled to a four-wave mixing module based on fiber components. ; FIG. 8 schematically shows a wavelength tunable ultrashort light pulse generation system in which a common injection module is coupled to different optical amplifiers adapted to different wavelength ranges; FIGS. 9 to 11 illustrate spectral and temporal profile measurements of ultrashort wavelength-tunable light pulses at the output of an injection module based on a supercontinuum source, respectively for different spectral widths of the tunable filter. DETAILED DESCRIPTION FIG. 1 schematically represents the general architecture of a wavelength-tunable ultrashort light pulse generation system. This system is based on the combination of different modules.
    [0012] In a simplified manner, the ultrashort wavelength tunable light pulse generation system comprises an injection module 10, a preamplification module 20 and a power amplifier module 30. The injection module 10, the preamplifier module 20 and the power amplification module 30 are arranged in series.
    [0013] The preamplifier module 20 comprises, for example, a first optical preamplifier 21 arranged in series with a second optical pre-amplifier 22, and separated by a spectral filter 28, preferably a bandpass. As detailed below with reference to FIGS. 2 and 3, the injection module 10 generates ultrashort light pulses 110 of the order of one picosecond, 25 spectrally filtered over a narrow bandwidth between a few hundred picometres. and a few nanometers and tunable wavelength. These ultrashort light pulses 110 can then be amplified to form wavelength-tunable amplified light pulses 120, 130 of high power spectral density.
    [0014] As an illustrative example, the preamp module 20 receives the ultrashort light pulses 110. The first optical preamplifier 21 generates preamplified light pulses 121. The optical component 28 receives the preamplified light pulses 121 and generates filtered light pulses 128. The second optical preamplifier 22 receives the light pulses 128 and generates pre-amplified light pulses 120. The optical power amplifier 30 receives the preamplified light pulses 120 and generates amplified light pulses 130. These amplified light pulses 130 are ultrashort, of long duration. between 0.1 and 30 picoseconds, filtered spectrally over a narrow bandwidth (between 250 μm and 1.5 nm) and wavelength-tunable according to the wavelength of the injection module 10. The amplified light pulses 120, 130 can also be con frequency-wise so as to generate wavelength tunable light pulses 140, 141 in other wavelength ranges than the spectral range of the injection module. Thus, a system of ultrashort light pulse generation tunable wavelength over a very wide range of wavelengths and high power spectral density is obtained.
    [0015] We will now describe in more detail the various modules of the system of FIG. 1 and in particular the injection module 10. Supercontinuum source injection module In a first embodiment, described with reference to FIG. the injection module 10 is based on the combination of a supercontinuum light source 9 and a tunable spectral filter 8. There are supercontinuum sources available commercially. A supercontinuum source 9 generally comprises a laser source 91 and a dispersive optical component 92, having an anomalous or preferably normal dispersion. The laser source 91 emits pulsed radiation, the source pulses having a duration of 800 ps at a single specific wavelength, for example 1064 nm, with a spectral width of 0.06 nm. A dispersive optical component 92 is used, for example an optical fiber, and more particularly based on a photonic optical fiber or a microstructured fiber. The dispersive optical component 92 spectrally expands the laser radiation to form supercontinuum type (SC) radiation extending continuously over a broad spectral band.
    [0016] The processes that cause the formation of supercontinuum radiation in a photonic or microstructured fiber include phase auto-modulation, Raman effect and / or four-wave mixing. These physical processes are complex and vary according to the length of the fiber, the pulse duration of the pump, and the pump wavelength compared to a wavelength where the dispersion is zero, also called dispersion zero. The choice of these parameters and the dispersive optical component 92 determines the spectral width and spectral shape of the supercontinuum radiation. In practice, it is preferable to optically pump the dispersive optical component 92 to a wavelength close to a wavelength at the Zero Dispersion Wavelength (ZDW) of this dispersive optical component 92, because the greater the dispersion is high and less non-linear effects are important. In one example, microstructured fiber 92 having a dispersion zero wavelength of less than 1064 nm (for example 1060 nm) is optically pumped by a pump diode having a pump wavelength of 1064. nm. In another example, the wavelength of the zero dispersion of the microstructured fiber 92 is 1300 nm and the pump wavelength is 1550 nm. Preferably, a dispersive optical component 92 is used. The fiber intrinsically produces light pulses 100 chirped linearly. The term "chirped pulses" means light pulses stretched temporally, and linearly chirped pulses having an instantaneous frequency that varies linearly with time. On the other hand, the operation of the supercontinuum source 9 in pulsed mode is obtained by controlling a laser pump 91. The supercontinuum source 9 thus delivers short pulses 100, having a duration of between 0.1ps and 100ps, low energy, having a pulse energy of the order of 10 nJ to 1 microjoule, depending on the duration of the pulses, and which extend over a broad spectral band. For example, the short pulses 100 have a duration of between 800 ps and 100 ns and a spectrum which ranges from 400 to 2000 nm.
    [0017] In one example, a laser 9 generates pulsed supercontinuum radiation with short pulses 100 having a duration of about ten nanoseconds (10 ns) and a repetition frequency of between 10 kHz and 100 MHz. The wavelength of this laser 9 varies as a function of the dispersive optical fiber 92 used (of single-cladding, double-cladding, LMA or PCF type) whose core diameter is between 2 μm and 10 μm. As a function of the dispersion zero of the dispersive optical fiber 92, we can generate short pulses 100 spectrally extended over a hundred nanometers to several hundred nanometers, for example from 600 nm to 900 nm or from 976 nm to 1100 nm, or from 1400 nm to 1600 nm or from 1800 to 2100 nm. The spectrum of the supercontinuum radiation thus generated can extend in a spectral range from ultraviolet (wavelength 300 nm) to infrared (wavelength 10 lm). For reasons of conversion efficiency, the spectral band of the injection module 10 based on a supercontinuum source is preferably limited so that the emission spectrum extends over a hundred nanometers, for example 980 nm to 1100 nm. In fact, the emission of the supercontinuum source outside this spectral band is not used in the rest of the system. Advantageously, the supercontinuum source 9 is coupled to an optical fiber 19 output. An optical system 39, for example a lens, spatially shapes the short pulses 100 emitted by the supercontinuum source 9 at the output of the optical fiber 19.
    [0018] An optical isolator 49, disposed between two halfwave plates 39, 59 is disposed between the supercontinuum source 9 and a spectral filter 8 wavelength tunable. The spectral filter 8 is an optical filter having at least one wavelength tunable spectral bandwidth over a wide spectral band in the infrared.
    [0019] In a particularly advantageous manner, the spectral filter 8 is wavelength-tunable over a wide spectral range within the spectral band of the supercontinuum source 9. More precisely, the central wavelength of the spectral filter 8 is wavelength tunable over a spectral range of at least one hundred nanometers, and possibly several hundred nanometers. During the wavelength tuning of the spectral filter, the bandwidth of the spectral filter generally remains constant. Preferably, the bandwidth of the spectral filter 8 is limited, for example less than 3 nm, preferably less than 1 nm, or 500 μm, or 250 μm.
    [0020] In the example results shown in Figures 9 to 11, the spectral filter has a spectral width of 1.5 nm (Fig. 9), 475 μm (Fig. 10) or 250 μm (Fig. 11), respectively. In general, the spectral filter 8 can be passive or active. In the case of a passive filter, the spectral selection is fixed. In the case of an active filter, the transmission peak can be shifted by acting on an external control parameter such as the displacement or rotation of a component, the temperature change or the applied voltage. A passive spectral filter thus makes it possible to filter a single wavelength. An active spectral filter allows wavelength tuning, either continuously or by jump, over several hundred nanometers within the supercontinuum's transmit range. More precisely, the spectral filters that can be inserted into the injection module 20 can be classified into different categories. The first category groups spatial filters that provide spatial dispersion as a function of wavelength or optical frequency. Among these filters, the prism-based or diffraction-grating filters provide an angular dispersion as a function of the optical frequency which makes it possible to select the useful wavelength.
    [0021] The second category concerns interference filters. An interference filter has maximum transmission for optical frequencies that cause constructive interference. The principle is then to use the interaction with two waves (Fabry-Perot etalon) or with multiple waves (multilayer mirrors) to create modulation effects of the transmission or the reflectivity of the component. These interference filters use multiple reflections on a number of surfaces. If all the reflected or transmitted waves are in phase, the transmission (or reflection) is maximum. Since the constructive interference effect is wavelength dependent in nature, variations in transmission (or reflection) are obtained as a function of the optical frequency or the wavelength. The third category concerns birefringent filters. A birefringent filter relies on polarization interference phenomena between the waves propagating in a birefringent material respectively along the ordinary axis and the extraordinary axis of this birefringent material. The principle of spectral filtering consists in using the extraordinary index which depends on the direction of propagation with respect to the optical axis in a birefringent medium.
    [0022] Finally, another category of diffractive spectral filter is between the spatial filters and the interference filters. A diffractive filter uses multiwave interference generally through a periodic variation of the index of bulk material. In this category are Bragg mirrors and acousto-optical filters. Resonant mirrors may also be used, combining a diffraction grating with a dielectric mirror. These diffractive filters have multiple adjustment possibilities for discriminating the output wavelength. According to a particularly advantageous aspect, certain filters can be configured to simultaneously generate several distinct and tunable coherent wavelengths.
    [0023] Thus, an interference or acousto-optical type filter can be used for this purpose. In the case of an interference filter, the wavelengths are passively filtered by the interference filter which passes spectral bands evenly spaced in wavelength, in the known form of a line comb. In the case of an acousto-optic filter, an acoustic wave is generally applied to a crystal to generate a diffracted wavelength. The simultaneous application of several acoustic waves, of different phases, to the crystal of the acousto-optical filter, allows the superposition of different diffracted wavelengths. Depending on the configuration of the interference or acousto-optical filter considered, the spacing between these different wavelengths can range from 0.01 nm to 100 nm and the number of wavelengths available simultaneously can be between 2 and 20 to 30. This number of wavelengths can be variable and be modified by a control of certain parameters of the filter. The spectral width of each spectral band is in general between 0.01 nm up to 5 nm, and preferably 0.1 nm. The wavelength tunability band can be performed over broad spectral bands ranging from 400 to 700 nm or from 700 to 1200 nm or from 1300 to 1700 or from 1800 to 2200 nm.
    [0024] In this way, several coherent and distinct coherent wavelengths are tunable in the same and single laser beam. Applications can be found for this type of multi-wavelength system, especially in spectroscopy or in bio-imaging. By way of example, using an acousto-optic tunable filter, it is possible by means of a diffract controller of up to sixteen wavelengths, with a spectral width of 0.6 nm. and separated by at least 1 nm. In this way, an acousto-optic filter was able to simultaneously filter pulses at three distinct wavelengths equal to 1000 nm, 1030 nm and 1100 nm. In summary, in the first embodiment, the injection module 10 includes a supercontinuum source and a spectral filter, as described above.
    [0025] A surprising result of this arrangement of the injection module is that the spectral filter 8 not only spectrally filters the light pulses over a narrow spectral band (from 250 μm to 1.5 nm spectral width), but that this spectral filter 8 also filters temporally the light pulses. At the output of the injection module 10, it is observed that the light pulses 110 have a duration of the order of one picosecond, for example between 0.1ps and 100 ps, and preferably from 20 to 50 ps, for pulses 100 emitted by the supercontinuum source of duration of the order of one nanosecond (between 800ps and 100 ns). More precisely, it can be seen that the duration of the light pulses 110 is inversely proportional to the spectral width of the spectral filter 8. This temporal filtering effect is not yet fully explained. For example, for a spectral width of the filter of 1.5 nm, a duration of light pulses of 3 μs (see Fig. 9) is measured, respectively for a spectral width of the filter of 475 μm, a measurement time is measured. 7 ps of light pulses (see Fig. 10), and for a spectral width of the filter of 250 μm, a pulse duration of 11 ps is measured (Fig. 11).
    [0026] Due to the complex process of forming supercontinuum radiation by different nonlinear effects, the filtering of this supercontinuum radiation results in the reduction of the pulse duration from nanosecond pulses to picosecond pulses, the pulse duration at the output of the spectral filter inversely varying with the spectral width of the spectral filter 8.
    [0027] An injection module 10 is thus produced from a supercontinuum source 9, based on a laser 91 emitting pulses at a single wavelength, which are then spectrally extended and chirped linearly, and then filtered by means of a spectral filter 8. This injection module 10 generates ultrashort light pulses 110 of the order of one picosecond duration (from 1 to 20 ps approximately), chirped linearly and spectrally filtered over a narrow spectral bandwidth (from 250pm to a few nanometers). By varying the central wavelength of the wavelength-tunable spectral filter 8, this first example of an injection module 10 makes it possible to tune the wavelength of the ultrashort light pulses 110 over a wide spectral band. at least a hundred nanometers, up to several hundred nm, relatively simply and at a lower cost. The ultrashort light pulses 110 generated by the injection module 10 based on a supercontinuum source 9 and a spectral filter 8 have a power of about 20 microwatts to 1 milliwatt. Nonlinear Loop Injection Module In a second embodiment, described with reference to FIG. 3, the injection module 10 is based on a wavelength-tunable mode lock laser over a wide range. spectral in the infrared, which extends for example from 976 nm to 1030 nm. More specifically, the injection module 10 is based on a mode lock laser comprising an amplifier nonlinear loop mirror (also called NALM for Non Linear Amplifying Loop Mirror).
    [0028] In FIG. 3, the injection module 10 comprises an amplifying nonlinear loop mirror 99. The nonlinear amplifying loop mirror 99 is in the form of 8 and comprises a first non-linear amplifying loop 11 and a second non-linear loop. linear amplifier 12, interconnected by a coupler 5.
    [0029] More specifically, the first amplifying non-linear loop 11 comprises a first optical amplifier 1, for example a section of Ytterbium doped optical fiber, of monomode type, of length 10 cm to 1 m, core diameter 6 to 10 microns, an optical coupler-multiplexer 6, a wavelength tunable spectral filter 8, an optical isolator 4 and an output coupler 15. A pump 3 is injected at the input of the optical coupler-multiplexer 6 into the first non-optical loop. linearly 11, so as to optically pump the first optical amplifier 1. The second amplifying nonlinear loop 12 comprises a second optical amplifier 2, for example a section of optical fiber doped Ytterbium, monomode type, length 10 cm to 1 m, core diameter 6 to 10 microns, an optical coupler-multiplexer 16 and a passive optical fiber 7, for example a silica fiber having a core diameter of 6 to 10 microns and a length of 10 cm at 20 m. A pump 13 is injected at the input of the optical coupler-multiplexer 16 into the second amplifying nonlinear loop 12, so as to optically pump the second optical amplifier 2. The pumps 3, 13 are, for example, fibrated monomode diodes. A spectral filter 8 has been disposed inside the cavity of the mode-locked laser. The spectral filter 8 is an optical filter having a wavelength-tunable bandwidth over a wide spectral range in the infrared as described in connection with the first embodiment. Preferably, the bandwidth of the spectral filter is limited, for example less than 3 nm or 1 nm or else 0.5 nm, or else 250 μm. By way of illustrative and non-limiting example, the wavelength-tunable spectral filter 8 comprises an interference filter, an acousto-optical filter or a thin-film acousto-optic filter. The spectral filter 8 may be wavelength-tunable by electronic and / or mechanical control means over a broad spectral band of at least one hundred nanometers, up to several hundreds of nm. Particularly advantageously, the first optical amplifier 1 and / or the second optical amplifier 2 are optical amplifiers with a broad spectral band. More precisely, instead of using an alumino-silicate amplifying fiber, an erbium doped doped phosphor doped optical fiber is selected so that the amplification spectral band of this optical fiber extends over at least one broad near-infrared spectral band from 976 nm to 1030 nm. By broad spectral band is meant here a spectral band extending over at least a hundred nanometers and extending over several hundred nanometers. Preferably, the first optical amplifier 1, the second optical amplifier 2 and the optical fiber 7 have a normal dispersion, that is to say a negative dispersion, for example between -100 to 0 ps / km / nm for silica.
    [0030] Thus, an injection module 10 based on a mode lock laser comprising an amplifying non-linear loop mirror 99 and a spectral filter 8 delivers ultrashort light pulses 110 of less than about 10 ps duration, linearly chirped, at a rate of a few MHz, spectrally filtered with a spectral width of about 5 nanometers and wavelength tunable between 976 nm and 1030 nm, and having a power of about a few milliwatts. In a variant, the injection module 10 is based on a mode lock laser comprising a nonlinear loop mirror (also called a NOLM for a nonlinear amplifying loop mirror) comprising only the first amplifying loop 11. In this case, the The dispersive component 7 is placed in the loop 11. An injection module 10, based on a supercontinuum source, as illustrated in FIG. 2, or on a nonlinear loop mirror, has thus been realized, as illustrated in FIG. The injection module 10 generates ultrashort light pulses 110 of less than about 10 ps duration, chirped linearly, spectrally filtered, the ultrashort pulses having a spectral width of the order of one nanometer, and tunable in wavelength. over a spectral band of several tens of nanometers, for example between 976 nm and 1030 nm, by means of the tunable spectral filter 8. The injection module 10 delivers ultrashort light pulses 110 of small spectral width (having a spectral width of about 1 nm), which can then be injected into an amplification module. Pre-amplification module FIG. 4 shows a pre-amplification module disposed at the output of an injection module 10 based for example on a supercontinuum source 9 and a spectral filter 8, as described with reference to FIG. pre-amplification module comprises an optical isolator 14, a multiplexer coupler 26, a pump 23, an optical amplifier 21 and another optical isolator 24. The preamplification module receives the ultrashort light pulses 110 from the injection module 10 and generates, by Optical amplification, pre-amplified ultrashort light pulses 120. Preferably, the optical amplifier 21 is an optical fiber amplifier, for example a rare-earth doped optical fiber amplifier.
    [0031] In this way, the same injection module 10 can inject ultrashort light pulses to different optical amplifiers associated respectively with different transmission bands. To do this, it is sufficient to tune the wavelength of the spectral filter 8 of the injection module as a function of the gain band of the selected optical amplifier. For example, an amplification module having a Master-Oscillator-Power-Amplifier (MOPA) structure is used, for example as shown in FIG. 1. Indeed, the MOPA architecture allows the extraction of high powers, under certain conditions, wavelength tunable over an extended spectral band corresponding to different usable optical amplifiers. Power amplification module 3031246 FIG. 5 shows a power amplification module that can be arranged at the output of an injection module 10 or at the output of a pre-amplification module. The power amplifier module comprises an optical isolator 34, a multiplexer coupler 36, a pump 33, an optical amplifier 31 and another optical isolator 44. The power amplification module 5 receives, for example, pre-amplified ultrashort light pulses 120 of the preamplification module and generates, by optical amplification, amplified ultrashort light pulses 130. Preferably, the optical amplifier 31 is an optical fiber amplifier, for example a rare earth doped optical fiber amplifier.
    [0032] In a particular exemplary embodiment, a Ytterbium doped fiber amplifier is used which allows amplification at a wavelength around 1 μm. In this way, a wavelength tuning range of the order of 100 nm (from 1020 nm to 1120 nm) is obtained, with pulses of variable duration ranging from 3 ps to 20 ps. In practice, the duration of the pulses is limited by the filter used.
    [0033] Another solid amplifying medium is in particular based on a neodymium crystal: YAG (Nd: YAG) for the spectral range around 1064 μm (doubled in frequency to obtain a wavelength of 532 nm). In other spectral domains, it is also possible to use other solid amplifying media. For example, an enhancement medium based on fosterite (emission wavelength at 1200 nm, then doubled in frequency at 600 nm), or erbium: YAG (Er: YAG) can be used. emitting around 3pm or alternatively alexandrite emitting at 755 nm and doubled in frequency at 380 nm or the ruby emitting at 694 and doubled in frequency at 350 nm. Another procedure may also be based on different optical fiber amplifiers respectively doped with different rare earths to cover different spectral ranges: in particular a praseodymium doped fiber: emitting in the range 488-900 nm and 1300 nm, a codoped fiber. neodymium-ytterbium emitting in the range 890940 nm and / or 976-1200 nm, a doped holmium fiber emitting in the range 2100-2200 nm, an Erbium doped fiber emitting in the range 1460-1600nm and / or a thulium-doped fiber emitting in the range 1600-2200 nm. The injection module 10 can deliver pulses 110 at a very high rate of 20 kHz to 50 MHz. At the output of the high-power amplification modules, from 100 mW to 10W, intense and ultrashort pulse trains are produced inside an envelope controlled by the duration and the rate of the pump flash of the amplifier.
    [0034] Amplification modules arranged in a star around a single injection module FIG. 8 shows a system for generating ultrashort light pulses tunable in wavelength according to another exemplary embodiment of the invention.
    [0035] The system includes a plurality of different optical amplifiers 31, 32, 33, 34 (based on solid glass or crystal media) arranged in a star pattern around a flash lamp in multi-pass arrangements most likely. This set of optical amplifiers 31, 32, 33, 34 is injected by a single injection module 10 which is wavelength-tunable and selectively switched towards one or the other of the optical amplifiers 31, 32, 33, 34. A filtering-switching can be achieved by means of suitable prisms 60-66 or diffractive elements and / or semi-reflective plates 50, 51, 52. Other semireflecting blades 54, 55 and mirrors 53 , 56 allow to recombine the different amplified beams to the same output. A non-linear optical medium 41 may be inserted at the output of the device to effect the frequency conversion required for delivery of the adapted wavelength depending on the desired application. Four-Wave Mixed Frequency Converter Module FIG. 6 schematically illustrates another exemplary embodiment of a wavelength-tunable ultrashort light pulse generator system. In this embodiment, the ultra-wavelength tunable wavelength light generation system comprises an injection module 10, a pre-amplification module 20 and / or a power amplifier module 30 and a frequency converter module 40. The injection module 10, the pre-amplification module 20, the power amplifier module 30 and the frequency converter module 40 are arranged in series. An optical isolator 44 is arranged between the power amplification module 30 and the frequency converter module 40. At the output of the optical amplifier or amplifiers 20, 30, amplified pulses 130 are obtained which are ultrashort and have a duration of between 1 ps and 20 ps. approximately, tunable wavelength over a hundred nanometers up to about 300 nm and intense from 1kW to 1 MW peak power. The original temporal structure of this laser source is very favorable for the frequency conversion, thus making it possible to extend very significantly the spectral range accessible by the complete system.
    [0036] The frequency converter module 40 is based on a non-linear optical component disposed downstream of the optical amplification module 30. By a non-linear degenerate four-wave mixing effect (DFWM for Degenerated Four Wave Mixing), from of two amplified pulses from the same source, the nonlinear optical component 40 produces a signal 140 at the double frequency of the amplified pulses 130. The nonlinear optical component 40 also produces a complementary wave 141 (also called idler). As a function of the wavelength of the amplified pulses 130, that is to say as a function of the wavelength of the spectral filter 8, the signal 140 is emitted at a wavelength included in the visible range and can be go from yellow to red over a spectral range of 550 to 700 nm still inaccessible.
    [0037] The amplified pulses 130 are of sufficient intensity that the frequency conversion by four-wave mixing has a high efficiency. Specifically, Four Wave Mixing (FWM) is a non-linear process associated with supercontinuum generation. The four-wave degenerate mixture (DFWM) occurs when two identical pump photons are annihilated to produce two photons with different wavelengths and the same total energy. Research has been intensely conducted on the phase matching process by the dispersion of optical fibers at telecommunication wavelengths around 1.5. It is the photonic crystal fibers (PCF) which have made it possible to provide the dispersion. necessary for pumping with shorter wavelengths, around 1 lm and thus produce wavelengths around 660nm. The conversion efficiencies are from 10 to 30% for a passage in a PCF-type fiber having a length of the order of one meter. Since the FWM converts the pump into a discrete wavelength pair rather than a wide continuum, it provides a much higher power spectral density at specific wavelengths. While a supercontinuum source of high power can generate some mW / nm on the visible spectrum, the FWM is able to deliver a power greater than ten watts at a specific wavelength. Thus, very high power spectral densities, of the order of W / nm, can be obtained by this process. By associating a tunable source 10, a preamplifier module and / or an amplifier module and a frequency converter module 40, it then becomes possible to generate new wavelengths over a wide band in the visible spectral range. Figure 7 illustrates an exemplary embodiment of an ultrashort pulse generation system and spectrally filtered combined with a frequency converter module. The system of Figure 7 is based primarily on fiber optic components. More precisely, the system of FIG. 7 comprises a supercontinuum source 9 and a spectral filter 8 tunable in wavelength, as described with reference to FIG. 2. The system comprises in series a first optical preamplifier 21, a second preamplifier 30, an optical power amplifier 30, and a non-linear optical component 40. The optical component 40 is for example a photonic crystal fiber (PCF). Optical isolators 14, 24, 34, 44 are arranged between the different modules of the system. The nonlinear optical component 40 receives the ultrashort, spectrally filtered and amplified light pulses and generates a signal wave 140 and a complementary wave 141 (also called idler), the sum of the optical frequencies of the signal wave 140 and the signal. complementary wave 141 being equal to the optical frequency of the pump wave. From a tunable injection module 10 in the near infrared range (between 976 and 1030 nm), a signal is obtained comprising light pulses 140 in the visible range 510 to 620 nm and / or a complementary comprising light pulses 141 in the infrared range of 1.8 to 5 microns. The pulse generation system illustrated in FIG. 7 has the advantage of being robust and compact. The applications of this system are very varied. The range of emission wavelength 5 accessible with such a tunable source combined with a high average power, from 100 mW to 10 W, is particularly innovative and makes it possible to envisage new thermally assisted laser processes whether in the imaging or machining. The pulse generation system according to any one of the embodiments detailed above is of particular interest for medical applications. Indeed, this system makes it possible to deliver energy radiation with pulses that are both ultrashort (of the order of a picosecond), having a small spectral width (of the order of 1 nm) and a central wavelength. tunable over a very wide spectral range (from UV near -300nnm to several microns). The architecture of the tunable injection module makes it possible to envisage numerous medical applications, particularly in dermatology, where the wavelength adjustment is necessary for the optimization of the treatment. This wavelength tunability over a wide spectral range makes it possible to adapt the parameters of the ultrashort light pulses delivered according to the operating conditions, for example to treat a spot or a skin defect. Different optical amplifiers adapted to amplify pulses in different wavelength ranges can be assembled around common pumping means (flash lamp, diodes or other). This amplification system is injected by a single injection module that has a broadband spectrum. The tunability of the set is based on the extremely wide spectrum of this injector and the average power on the use of high gain amplifier media. In addition, the ultra-short pulse duration allows the pulse generation system to be combined with a nonlinear optical frequency conversion component. This frequency conversion thus makes it possible to extend very significantly the spectrum generated by the complete system. Pulse measurements FIGS. 9 to 11 represent spectral profile measurements of wavelength-tunable ultrashort light pulses obtained with the aid of an optical spectrum analyzer and respectively measurements of the temporal profile of these pulses. , obtained by autocorrelation, for different spectral widths of the tunable filter 8. In FIG. 9, amplified pulses are measured at the output of a pulse generation system as detailed with reference to FIG.
    [0038] Both the duration and the spectral width of these pulses are measured. The spectral width of the pulses is determined by the spectral width of the tunable filter 8. In FIGS. 9 to 11, there are shown measurements of the intensity of a light pulse as a function of time (small circles) and an adjustment curve. Gaussian of the 3031246 19 temporal form of this pulse (solid line). In insert, there is shown a measurement of the intensity of this pulse as a function of the wavelength. In FIG. 9, it is deduced from the Gaussian adjustment curve of the temporal shape of the pulse that the duration of this pulse is equal to 3 μs. In FIG. 9 as an insert, the central wavelength of this pulse, which is about 1030 nm, is determined, as is the spectral width of this pulse, which is 1.5 nm. By only varying the spectral width of the tunable filter and keeping the central wavelength of this filter fixed, measurements are made in a manner analogous to that of FIG. 9.
    [0039] In Fig. 10, light pulses having a duration of 7 ps, a spectral width of 475 μm and a central wavelength of about 1030 nm are measured. Similarly, in FIG. 11, light pulses having a duration equal to 11 μs, a spectral width of 250 μm and a central wavelength of about 1030 nm are measured.
    [0040] The system thus makes it possible to generate pulses having both an ultra-short duration (of about 1 picosecond to 11ps) and a very narrow spectral width of 1.5 nm, 475 μm and 250 μm, respectively, at a central wavelength. about 1030 nm. The system makes it possible to generate ultrashort laser pulses of picosecond duration, of very low spectral width. These pulses are wavelength tunable over a range of several tens to hundreds of nanometers. These pulses can be amplified so that picosecond pulses with a very high spectral power density tunable in wavelength are obtained over a wide spectral range from ultraviolet (300 nm) to infrared (up to 10 microns). ).
    权利要求:
    Claims (14)
    [0001]
    REVENDICATIONS1. A system for generating ultrashort light pulses tunable in wavelength in a spectral range between ultraviolet and infrared, characterized in that said system comprises: an injection module (10) comprising a light source ( 9, 99) and a spectral filter (8) wavelength tunable, - the light source (9, 99) being adapted to generate short light pulses (100) of duration between several hundred picoseconds and a hundred of nanoseconds, said short light pulses (100) extending over an emission spectral band having a spectral width of several tens of nanometers to several hundred nanometers, - the spectral filter (8) having at least one spectral bandwidth defined by a central wavelength (Lambda3) and a spectral width (Alambda3) of between 10 μm and 10 nm and the central wavelength (Lambda3) of said spectral bandwidth being tunable in a spectral range ([Lambdal; Lambda2]) within the emission spectral band of the light source (9, 99), the spectral filter (8) being adapted to spectrally filter and to temporally shape said short light pulses (100), so that the injection module (10) generates ultrashort light pulses (110) of picosecond duration, spectrally filtered and wavelength-tunable according to the central wavelength of said spectral bandwidth; and - at least one optical amplifier (20, 30) disposed at the output of the injection module (10), said at least one optical amplifier (20, 30) being adapted to receive said spectrally filtered and tunable ultrashort light pulses (110) in wavelength and for generating by optical amplification ultrashort amplified pulses (120, 130) filtered spectrally and wavelength-tunable according to the central wavelength of said spectral bandwidth of the spectral filter (8).
    [0002]
    An ultrashort light pulse generating system according to claim 1 wherein the light source (9, 99) comprises a supercontinuum source (9) and wherein the spectral filter (8) is disposed on an optical path downstream of the light source. supercontinuum source (9). 3031246 21
    [0003]
    An ultrashort light pulse generation system according to claim 1 wherein the light source (9, 99) comprises an amplifier non-linear loop mirror (99), the non-linear amplifier loop mirror (19) comprising another amplifier optical fiber (1) disposed in the optical path of the non-linear loop mirror and the spectral filter (8) being disposed in the optical path of the non-linear loop mirror (99).
    [0004]
    An ultrashort light pulse generating system according to claim 3 wherein the non-linear amplifier loop mirror (99) is in the form of 8 and 10 comprises a first bidirectional amplifying non-linear loop (11) and a second non-linear loop. unidirectional linear array (12), the spectral filter (8) being arranged in the first nonlinear loop (11).
    [0005]
    5. A system for generating ultrashort light pulses according to one of claims 1 to 4, wherein the spectral filter (8) comprises a prism-based filter, a diffraction grating-based filter, an interference filter, a birefringent filter, a Bragg mirror diffractive filter, a resonant mirror diffractive filter, an acousto-optic filter or a thin-film acousto-optic filter. 20
    [0006]
    An ultrashort light pulse generating system according to claim 5 wherein the spectral filter (8) is an interference filter or an acousto-optical filter configured to simultaneously filter a plurality of spectrally spaced spectral bandwidths from each other, each a spectral bandwidth being defined by a central wavelength (Lambda3) and a spectral width (Alambda3) of between 10 pm and 10 nm, and each central wavelength (Lambda3) of the spectral filter (8) being tunable in a spectral range ([Lambdal; Lambda2]) within the emission spectral band of the light source (9, 99). 30
    [0007]
    An ultrashort light pulse generating system according to claim 5 or 6 wherein the spectral filter (8) has a spectral width (Alambda3) of less than 1 nm.
    [0008]
    8. A system for generating ultrashort light pulses according to one of claims 1 to 7 wherein said at least one optical amplifier (20, 30) comprises a plurality of optical amplifiers (31, 32, 33, 34) arranged and / or an optical fiber preamplifier (20, 21, 22) and a power optical fiber amplifier (30) arranged in series. 3031246 22
    [0009]
    An ultrashort light pulse generating system according to one of claims 1 to 8, wherein the light source (9, 99), the spectral filter (8) and / or the at least one optical amplifier (20, 30). include fiber optic components. 5
    [0010]
    An ultrashort light pulse generating system according to one of claims 1 to 9 wherein said at least one optical amplifier (20, 30) comprises a rare earth doped optical fiber. 10
    [0011]
    An ultrashort light pulse generating system according to one of claims 1 to 10, further comprising: - a dispersive optical component (40) with negative dispersion disposed at the output of the at least one optical amplifier (20, 30), the a dispersive optical component (40) being adapted to simultaneously receive a pump pulse and an ultra-short amplified pulse (120, 130) and to generate, by nonlinear optical effect of four-wave mixing, a first optical signal and a second optical signal the first or second optical signal comprising an output light pulse (140, 141) of the order of one picosecond to one hundred picoseconds and a predetermined wavelength in the ultraviolet, visible or infrared range. and having a spectral width of less than 10 nm, the predetermined wavelength of the output light pulse (140, 141) being tunable according to the central wavelength e (Lambda3) of the spectral filter (8). 25
    [0012]
    The ultrashort light pulse generating system of claim 11 wherein the dispersive optical component (40) comprises a photonic optical fiber section.
    [0013]
    13. A method of generating wavelength-tunable ultrashort light pulses comprising the steps of: generating short light pulses (100) of duration ranging from several hundreds of picoseconds to one hundred nanoseconds, said short light pulses (100) extending over an emission spectral band having a spectral width of several tens of nanometers to several hundred nanometers; spectral filtering of said short pulses in at least one spectral bandwidth defined by a central wavelength (Lambda3) and a spectral width (3.1ambda3) of between 10 μm and 10 nm, the central wavelength ( Lambda3) of said spectral bandwidth being tunable within a spectral range ([Lambdal; Lambdan included within said emission spectral band, the spectral filter being adapted to spectrally filter and to temporally forming said short light pulses (100) to generate ultrashort light pulses (110) of picosecond duration, spectrally filtered and wavelength-tunable according to the central wavelength of said spectral bandwidth, and optical amplification of said spectrally filtered ultrashort pulses (110) to generate filtered ultrashort amplified pulses (120, 130) s spectrally and wavelength tunable according to the central wavelength of said spectral bandwidth of the spectral filtering.
    [0014]
    A method of generating wavelength-tunable ultrashort light pulses according to claim 13, further comprising the step of: generating, from a pump pulse and an ultra-short amplified pulse (120, 130), by a nonlinear optical effect of four-wave mixing in a dispersive optical dispersive component (40), a first optical signal and a second optical signal, the first or second optical signal comprising an ultrashort light pulse of output (140, 141), of duration of the order of one picosecond to one hundred picoseconds and to a predetermined wavelength in the ultraviolet, visible or infrared range with a spectral width of less than 10 nm, the length of the predetermined wave of the ultrashort light output pulse (140, 141) being tunable according to the central wavelength (Lambda3) of said spectral bandwidth of the spectral filtering,
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    同族专利:
    公开号 | 公开日
    WO2016108020A1|2016-07-07|
    FR3031246B1|2018-02-09|
    EP3241259B1|2020-11-11|
    CA2972572A1|2016-07-07|
    US10250006B2|2019-04-02|
    EP3241259A1|2017-11-08|
    US20170352999A1|2017-12-07|
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    法律状态:
    2015-10-16| PLFP| Fee payment|Year of fee payment: 2 |
    2016-07-01| PLSC| Publication of the preliminary search report|Effective date: 20160701 |
    2016-09-16| PLFP| Fee payment|Year of fee payment: 3 |
    2017-11-17| PLFP| Fee payment|Year of fee payment: 4 |
    2019-12-17| PLFP| Fee payment|Year of fee payment: 6 |
    2021-02-05| PLFP| Fee payment|Year of fee payment: 7 |
    2021-12-20| PLFP| Fee payment|Year of fee payment: 8 |
    优先权:
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    FR1463399|2014-12-29|
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    US15/540,734| US10250006B2|2014-12-29|2015-12-24|System and method for generating wavelength-tunable, ultra-short light pulses having high power spectral density|
    PCT/FR2015/053751| WO2016108020A1|2014-12-29|2015-12-24|System and method for generating wavelength-tunable, ultra-short light pulses having high power spectral density|
    EP15823717.2A| EP3241259B1|2014-12-29|2015-12-24|System and method for generating wavelength-tunable, ultra-short light pulses having high power spectral density|
    CA2972572A| CA2972572A1|2014-12-29|2015-12-24|System and method for generating wavelength-tunable, ultra-short light pulses having high power spectral density|
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